The plasma cleaning machine removes the metal oxide principle
Author: Shenzhen three and wave of Electrical and Mechanical Technology Co., LtdIssuing Time:2017-08-03 08:57:55Pageviews:3501【smallmediumbig】
The plasma washer removes the metal oxide
Chemical cleaning: surface reaction to chemical reaction-based plasma cleaning, also known as PE.
Example: O2 + e- → 2O ※ + e-O ※ + organic → CO2 + H2O
It can be seen from the reaction, oxygen plasma through the chemical reaction can be non-volatile organic matter into vola...
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The plasma washer removes the metal oxide
Chemical cleaning: surface reaction to chemical reaction-based plasma cleaning, also known as PE.
Example: O2 + e- → 2O ※ + e-O ※ + organic → CO2 + H2O
It
can be seen from the reaction, oxygen plasma through the chemical
reaction can be non-volatile organic matter into volatile H2O and CO2.
Example: H2 + e- → 2H ※ + e-H ※ + non-volatile metal oxide → metal + H2O
From
the reaction can be seen, hydrogen plasma through the chemical reaction
can remove the metal surface oxide layer, clean the metal surface.
Physical
cleaning: surface reaction to the physical reaction of the main plasma
cleaning, also known as sputtering corrosion (SPE).
Example: Ar + e- → Ar ++ 2e-Ar ++ Contamination → Volatile contamination
Ar
+ is accelerated by kinetic energy under self-bias or external bias,
and then bombardes the surface of the workpiece to be cleaned. It is
typically used to remove oxides, epoxy spills or micro-particulate
contaminants while activating surface energy.
2017-08-03
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